The M-2000® spectroscopic ellipsometer range is engineered to meet the diverse demands of thin film characterization customers.  Because of an advanced optical design, wide spectral range, and fast data acquisition combine and as a result the M2000 is an extremely powerful and versatile tool. The M-2000 delivers both speed and accuracy to users. The patented RCE technology combines Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of configurations. The M-2000 is the first ellipsometer to truly excel at everything from in-situ monitoring and also process control to large-area uniformity mapping and general purpose thin film characterization. As a results no other ellipsometer technology acquires a full spectrum faster.

Why an M-2000? Because of advanced features such as

Advanced Ellipsometer Technology

First of all the M-2000 utilizes our patented RCE (rotating compensator ellipsometer) technology to achieve high accuracy and precision.

Fast Spectral Detection

Another feature of the RCE design is compatible with advanced, proven CCD detection to measure ALL wavelengths simultaneously.

Wide Spectral Range

Also users can collect over 700 wavelengths from the ultraviolet to the near infrared – all simultaneously.

Flexible System Integration

With modular optical design, the M-2000 is suited for direct attachment to your process chamber or configured on any of our table-top bases.

Accuracy

Advanced design ensures accurate ellipsometry measurements for any sample.