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VASE

Ellipsometer

Product Category: Ellipsometry

Industry: Particle and surface science

Supplier: J A Woollam

Description

VASE®Ellipsometer
The VASE is our most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more.
It combines high accuracy and precision with a wide spectral range up to 193 to 2500nm. Variable wavelength and angle of incidence allow flexible measurement capabilities including:
  • Reflection and Transmission Ellipsometry
  • Generalized Ellipsometry
  • Reflectance (R) intensity
  • Transmittance (T) intensity
  • Cross-polarized R/T
  • Depolarization
  • Scatterometry
  • Mueller-matrix

Why a VASE?

Maximum Data Accuracy
The VASE features a rotating analyzer ellipsometer (RAE) combined with our patented AutoRetarder® for unparalleled data accuracy.
High Precision Wavelength Selection
The HS-190™ scanning monochromator is designed specifically for spectroscopic ellipsometry. It optimizes speed, wavelength accuracy, and light throughput, while automatically controlling selection of wavelengths and spectral resolution.
Flexible Measurements
The V-VASE features a vertical sample mount to accommodate a large variety of measurement geometries including reflection, transmission, and scattering.

RAE + AutoRetarder Technology

Rotating Analyzer Ellipsometers (RAE) maximize data accuracy near the “Brewster” condition - where Ψ/Δ data are content-rich. However, this region can be limiting for samples with reduced signal.
The patented AutoRetarder is a computer controlled waveplate which modifies the light beam polarization before it reaches the sample. This produces optimum measurement conditions for any sample, under any conditions.
AutoRetarder accurately measures:
  • Ψ and Δ over the full range!
  • Generalized (anisotropic) Ellipsometry
  • Depolarization data
  • Mueller-matrix data
The Auto Retarder is moved into five different positions proving five different input polarization states.

Scientific Solutions

Scientific Solutions have been providing carefully selected laboratory and analytical equipment to Australian Industries such as Environmental, Pharmaceutical, Food and Beverage and Research markets of the Science Industry for over a decade.

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