The VASE is our most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more.
It combines high accuracy and precision with a wide spectral range up to 193 to 2500nm. Variable wavelength and angle of incidence allow flexible measurement capabilities including:
- Reflection and Transmission Ellipsometry
- Generalized Ellipsometry
- Reflectance (R) intensity
- Transmittance (T) intensity
- Cross-polarized R/T
Why a VASE?
Maximum Data Accuracy
The VASE features a rotating analyzer ellipsometer (RAE) combined with our patented AutoRetarder® for unparalleled data accuracy.
High Precision Wavelength Selection
The HS-190™ scanning monochromator is designed specifically for spectroscopic ellipsometry. It optimizes speed, wavelength accuracy, and light throughput, while automatically controlling selection of wavelengths and spectral resolution.
The V-VASE features a vertical sample mount to accommodate a large variety of measurement geometries including reflection, transmission, and scattering.
RAE + AutoRetarder Technology
Rotating Analyzer Ellipsometers (RAE) maximize data accuracy near the “Brewster” condition - where Ψ/Δ data are content-rich. However, this region can be limiting for samples with reduced signal.
The patented AutoRetarder is a computer controlled waveplate which modifies the light beam polarization before it reaches the sample. This produces optimum measurement conditions for any sample, under any conditions.
AutoRetarder accurately measures:
- Ψ and Δ over the full range!
- Generalized (anisotropic) Ellipsometry
- Depolarization data
- Mueller-matrix data
The Auto Retarder is moved into five different positions proving five different input polarization states.