Why a VUV-VASE?
Wide Spectral RangeThe VUV-VASE covers wavelengths from below 140nm to 1700nm.
High AccuracyUtilizing our patented AutoRetarder®, the VUV-VASE guarantees accuracy for any sample measurement.
Convenient Sample LoadingSpecial design allows fast, efficient sample loading without contaminating system purge.
Protect Your SamplesThe monochromator is placed before the sample to limit exposure of photosensitive materials.
Product Category: Ellipsometry
Industry: Particle and surface science
Supplier: J A Woollam
Lithography thin films were an important motivation for the VUV-VASE® development. It has been successfully used to characterize all types of films in this area, including:
• Bottom and Top AR Coatings
• Photomask Coatings
• Stepper Optical Coatings
• And more…
Measure film thickness and refractive index (n and k) at all lithography lines: 157nm, 193nm, 248nm…
|Ellipsometer Configuration||RAE with AutoRetarder|
|Wavelength Range||VUV-VASE (Standard)
|Number of Wavelengths||User defined before measurement|
|Angles of Incidence||10° to 90° (146nm to 310nm)
25° to 90° (310nm to 2500nm)
|Data Acquisition Rate||1 to 3 seconds per wavelength|
|Power||100-120 VAC/15A, 200-240 VAC/8A|
|Gas Requirements||Contact J.A. Woollam for details.|