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M2000

The M-2000® spectroscopic ellipsometer range is engineered to meet the diverse demands of thin film characterization customers.  Because of an advanced optical design, wide spectral range, and fast data acquisition combine and as a result the M2000 is an extremely powerful and versatile tool. The M-2000 delivers both speed and accuracy to users. The patented RCE technology combines Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of configurations. The M-2000 is the first ellipsometer to truly excel at everything from in-situ monitoring and also process control to large-area uniformity mapping and general purpose thin film characterization. As a results no other ellipsometer technology acquires a full spectrum faster.

Why an M-2000? Because of advanced features such as

Advanced Ellipsometer Technology

First of all the M-2000 utilizes our patented RCE (rotating compensator ellipsometer) technology to achieve high accuracy and precision.

Fast Spectral Detection

Another feature of the RCE design is compatible with advanced, proven CCD detection to measure ALL wavelengths simultaneously.

Wide Spectral Range

Also users can collect over 700 wavelengths from the ultraviolet to the near infrared – all simultaneously.

Flexible System Integration

With modular optical design, the M-2000 is suited for direct attachment to your process chamber or configured on any of our table-top bases.

Accuracy

Advanced design ensures accurate ellipsometry measurements for any sample.

Product Category: Ellipsometry

Industry: Particle and surface science

Supplier: J A Woollam

Description

 

Automated Angle (Horizontal) M-2000

m-2000-ellipsometer-auto-angle-profile The horizontal M-2000 system offers wide range of options like large area mapping, liquid cells, and heat stages.Ideal for general use and large samples.

Automated Angle (Vertical) M-20000

m-2000-ellipsometer-vertical The vertical M-2000 system offers wide angle range and flexibility.
Independent control of sample and detector angle for
diverse reflection or transmission measurements.

Fixed Angle M-2000

m-2000-fixed-angle-ellipsometer Translator Size: 50×50 mm XY

Focused M-2000

m-2000-focused-ellipsometer The smallest M-2000 spot size available (25 by 60 microns) for demanding feature sizes.

 

Specifications

Ellipsometer Configuration Dual RCE
Wavelength Range D
DI
X-210
XI-210
X
XI
U
UI
V
VI
193-1000 nm
193-1690 nm
210-1000 nm
210-1690 nm
245-1000 nm
245-1690 nm
245-1000 nm
245-1690 nm
370-1000 nm
370-1690 nm
Number of Wavelengths D
DI
X-210
XI-210
X
XI
U
UI
V
VI
500 wavelengths
690 wavelengths
485 wavelengths
675 wavelengths
470 wavelengths
660 wavelengths
470 wavelengths
660 wavelengths
390 wavelengths
580 wavelengths
Detector CCD
Angles of Incidence 45°-90° (Automated Angle Base)20°-90° (Vertical Automated Angle Base)

~65° (Focused Base)

65° (Fixed Angle Base)

65° (Test Base)

Data Acquisition Rate
(Complete Spectrum)
0.05 seconds (2-5 seconds is Typical)
Max substrate thickness 18mm

Facility Requirements

Power 100/240 VAC, 47-63Hz, <1 Amp

Dimensions

Dimensions vary depending on options. More details coming soon.

Brochures

m-2000-brochure

Scientific Solutions

Scientific Solutions have been providing carefully selected laboratory and analytical equipment to Australian Industries such as Environmental, Pharmaceutical, Food and Beverage and Research markets of the Science Industry for over a decade.

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