M2000
Why an M-2000? Because of advanced features such as
Advanced Ellipsometer Technology
First of all the M-2000 utilizes our patented RCE (rotating compensator ellipsometer) technology to achieve high accuracy and precision.Fast Spectral Detection
Another feature of the RCE design is compatible with advanced, proven CCD detection to measure ALL wavelengths simultaneously.Wide Spectral Range
Also users can collect over 700 wavelengths from the ultraviolet to the near infrared – all simultaneously.Flexible System Integration
With modular optical design, the M-2000 is suited for direct attachment to your process chamber or configured on any of our table-top bases.Accuracy
Advanced design ensures accurate ellipsometry measurements for any sample.Product Category: Ellipsometry
Industry: Particle and surface science
Supplier: J A Woollam
Description
Automated Angle (Horizontal) M-2000 |
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The horizontal M-2000 system offers wide range of options like large area mapping, liquid cells, and heat stages.Ideal for general use and large samples. | |
Automated Angle (Vertical) M-20000 |
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The vertical M-2000 system offers wide angle range and flexibility. Independent control of sample and detector angle for diverse reflection or transmission measurements. |
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Fixed Angle M-2000 |
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Translator Size: 50×50 mm XY | |
Focused M-2000 |
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The smallest M-2000 spot size available (25 by 60 microns) for demanding feature sizes. |
Specifications
Ellipsometer Configuration | Dual RCE | |
Wavelength Range | D DI X-210 XI-210 X XI U UI V VI |
193-1000 nm 193-1690 nm 210-1000 nm 210-1690 nm 245-1000 nm 245-1690 nm 245-1000 nm 245-1690 nm 370-1000 nm 370-1690 nm |
Number of Wavelengths | D DI X-210 XI-210 X XI U UI V VI |
500 wavelengths 690 wavelengths 485 wavelengths 675 wavelengths 470 wavelengths 660 wavelengths 470 wavelengths 660 wavelengths 390 wavelengths 580 wavelengths |
Detector | CCD | |
Angles of Incidence | 45°-90° (Automated Angle Base)20°-90° (Vertical Automated Angle Base)
~65° (Focused Base) 65° (Fixed Angle Base) 65° (Test Base) |
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Data Acquisition Rate (Complete Spectrum) |
0.05 seconds (2-5 seconds is Typical) | |
Max substrate thickness | 18mm |
Facility Requirements
Power | 100/240 VAC, 47-63Hz, <1 Amp |
Dimensions
Dimensions vary depending on options. More details coming soon.