alpha-SE Ellipsometer
Why an alpha-SE?
Easy-to-Use
Push-button operation is complemented by advanced software that takes care of the work for you.Powerful
Proven spectroscopic ellipsometer technology gives you both thickness and index with much higher certainty than other techniques.Flexible
Works with your materials – dielectrics, semiconductors, organics, and more.Affordable
Spectroscopic ellipsometry for simple sample systems.Fast
Hundreds of wavelengths simultaneously collected in seconds for immediate results.Product Category: Ellipsometry
Industry: Particle and surface science
Supplier: J A Woollam
Description
DIELECTRIC FILMS
With fast measurement speed and push-button operation, the alpha-SE® is ideal for qualifying thin films. Single-layer dielectrics on silicon or glass substrates can be measured in seconds. Log results for easy-to-use comparisons in both graphical and tabular formats.
For organic layers on golf, the phase parameter (Delta) shifts downward with increasing thickness.
SELF-ASSEMBLED MONOLAYERS
Phase information of a spectroscopic ellipsometry measurement is highly sensitive to very thin films (<10nm). Self-assembled monolayers can be assessed and quickly compared using the alpha-SE.
For organic layers on gold, the phase parameter (Delta) shifts downward with increasing thickness.
ABSORBING FILMS
Advanced models provide quick and efficient fits for a wide variety of materials you may encounter.
Materials• a-Si |
Models• Lorentz |
COATINGS ON GLASS
Patented technology allows accurate measurements on any substrate: metal, semiconductor, or glass. On transparent substrates, the alpha-SE® measures depolarization to correct for light returning from the backside of the substrate. This unwanted light can confuse other ellipsometers, but the alpha-SE® ensures accurate optical constants.
The high sensitivity of alpha-SE technology provides microstructural details that you can not get from Reflectance measurements. Here a thin film of Titanium Dioxide is measured with the alpha-SE and its index is found to vary between the substrate and surface. A graded model best describes this sample.
FAQ's
What advantages and limitations does the alpha-SE have compared to other UV-VIS-NIR models?
The alpha-SE is more compact and more affordable. It does not have as many configuration, upgrade, or accessory options. It is fully capable of determining film thickness, optical constants, and other properties of interest typically determined by ellipsometry.
Can the alpha-SE be used in situ?
No. The alpha-SE was specifically designed for benchtop use.
Which software package is included?
CompleteEASE
Specifications
| Ellipsometer Configuration | RCE |
| Wavelength Range | 380-900 nm |
| Number of Wavelengths | 180 |
| Detector | CCD |
| Angles of Incidence | 65°, 70°, 75° or 90° (straight-through) |
| Data Acquisition Rate (Complete Spectrum) |
3 sec. – Fast mode 10 sec. – Standard mode 30 sec. – High-precision mode |
| Max substrate thickness | 16mm |
Facility Requirements
| Power | 100/240 VAC, 47-63Hz, <1 Amp |
Dimensions
| Width | 19″ |
| Depth | 30″ |
| Height | 36″ |
Brochures
Accessories
500µL Liquid Cell |
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500µL liquid capacity70° angle of incidence
Designed for glass slides & 1” or 2” wafers |
QCM-D |
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Tilt stage designed to hold Q-Sense QCM-D Quartz Crystal Microbalance (E-Series with E1 Chamber) |
Transmission Mount |
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Holds sample vertically in the path of light beam to allow normal incidence transmission measurements. |