The VUV-VASE® variable angle spectroscopic ellipsometer is the gold standard for optical characterization of lithography thin films. It measures wavelengths from vacuum ultraviolet (VUV) to near infrared (NIR). This provides incredible versatility to characterize numerous materials: semiconductors, dielectrics, polymers, metals, multi-layers and liquids such as immersion fluids Why a VUV-VASE? Wide Spectral Range The VUV-VASE covers wavelengths from below 140nm…

The IR-VASE® is the first and only spectroscopic ellipsometer to combine the chemical sensitivity of FTIR spectroscopy with thin film sensitivity of spectroscopic ellipsometry. The IR-VASE covers the wide spectral range from 1.7 to 30 microns (333 to 5900 wavenumbers). It is used to characterize both thin films and bulk materials in research and industry. This rapidly growing technology…

For routine measurements of thin film thickness and refractive index, this ellipsometer allows you to mount a sample, choose the model that matches your film, and press “measure”. You have results within seconds. Why an alpha-SE? Easy-to-Use Push-button operation is complemented by advanced software that takes care of the work for you. Powerful Proven spectroscopic…

The iSE is a new in-situ spectroscopic ellipsometer developed for real-time monitoring of thin film processing.  Using our proven technology, the iSE enables users to optimize optical properties of deposited films, control film growth with sub-angstrom sensitivity, and monitor growth kinetics. Why an iSE? Powerful With the power of spectroscopic ellipsometry (SE), the iSE is…

RC2 The RC2® design builds on 25 years of  Ellipsometer experience. It combines the best features of previous Ellipsometer models. This includes innovative new technology such as dual rotating compensators, achromatic compensator design, advanced light source and next-generation spectrometer design. Because of this the RC2 Ellipsometer is a near-universal solution for the diverse applications of spectroscopic…

The VASE® is an accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range – up to 193 to 3200nm. Variable wavelength and angle of incidence allow flexible measurement capabilities, including: • Reflection and Transmission Ellipsometry • Generalized Ellipsometry…

The M-2000® spectroscopic ellipsometer range is engineered to meet the diverse demands of thin film characterization customers.  Because of an advanced optical design, wide spectral range, and fast data acquisition combine and as a result the M2000 is an extremely powerful and versatile tool. The M-2000 delivers both speed and accuracy to users. The patented RCE technology combines Rotating Compensator Ellipsometry…